Semiconductor Manufacturing Equipment

    Semiconductor Manufacturing Equipment - the semiconductor manufacturing industry demands high precision, speed, and quality to be competitive in their market. From assembly and testing, to finishing and quality control, PHD actuators offer the high quality and provide superior delivery to meet your demands in your automated processes.

    Compact Cylinder - ML303340

    Compact Cylinder - ML303340

    • Pneumatic door lock cylinders
    • Switch ready
    • Single-acting with spring on extend
    Corrosion-Resistant Plastic Slide - ML305733

    Corrosion-Resistant Plastic Slide - ML305733

    • Constructed of PET plastic and stainless steel
    • No grooves in body to eliminate bacterial growth
    • Deionized water compatible
    Cylinder with PET Plastic Body and Stainless Steel Piston Rod - ML310898

    Cylinder with PET Plastic Body and Stainless Steel Piston Rod - ML310898

    • Switch ready
    • Fluoroestomer seals
    • Compact design
    Dual Jaw Gripper - ML308237

    Dual Jaw Gripper - ML308237

    • 2 sets of synchronized jaws
    • Each set of jaws are independently operated
    • Ideal for part and tray stacking
    Lift Table - ML310870

    Lift Table - ML310870

    • Table lift station
    • Rigid construction for long life
    • Stainless steel piston rod and guide shafts
    • Reduces vibration at end of travel
    Low Profile Staging Stop - ML307537

    Low Profile Staging Stop - ML307537

    • Field repairable
    • Custom cam design eliminates the need for linkages
    • Locks in the up position
    PET Plastic Angular Gripper - ML301141

    PET Plastic Angular Gripper - ML301141

    • PET plastic body and aluminum jaws
    • Deionized water environment
    • Single acting
    PET Plastic Gripper - ML303025

    PET Plastic Gripper - ML303025

    • Designed for deionized water applications
    • Compact and lightweight
    • Double-acting for use in internal and external gripping applicaitons
    • Field repairable
    PET Plastic Rotary Actuator

    PET Plastic Rotary Actuator

    • Contructed of titanium for extreme corrosion resistance
    • 140° rotation
    • Built in angle adjustments
    PVC Cylinder - ML311080

    PVC Cylinder - ML311080

    • All PVC construction
    • Fluoroelastomer seals
    • Gas chamber solution
    Pick Head - ML304240

    Pick Head - ML304240

    • Six bore slide block
    • Valve manifolded cylinder body assembly
    • Front pickhead assembly
    • Vacuum plate attached to end slide assemblies
    • Each slide independently operated
    Pin (Snugger) Cylinder

    Pin (Snugger) Cylinder

    • Compact, single acting
    • Long life
    • Custom pin height to fit your specific requirement
    • Electroless nickel body, corrosion resistant
    Plastic PET Body - Single Acting Volumetric Pump - ML305001

    Plastic PET Body - Single Acting Volumetric Pump - ML305001

    • Designed to be compatible with deionized water
    • Single acting motion - material is dispensed with each piston stroke
    • Constructed of 100% corrosion-resistant PET plastic and stainless steel
    Polymer PET Plastic Cylinder - ML308838

    Polymer PET Plastic Cylinder - ML308838

    • Designed for part production in a deionized water environment
    • Fully field repairable
    • Simple design, long life
    • Clean room lube available
    Polymer PET Plastic Gripper - ML213853

    Polymer PET Plastic Gripper - ML213853

    • Constructed of PET plastic and passivated stainless steel with Nitrile piston seals for harsh environments
    • Designed for part production in a deionized water environment
    • Ported body allows for the connection of pressure or vacuum to the jaw area
    Polymer Series GRW with Stainless Steel Jaws - ML302657

    Polymer Series GRW with Stainless Steel Jaws - ML302657

    • PET plastic body and bushing
    • Stainless steel jaws and jaw guides
    • Fluoroelastomer seals
    Rotary Actuator for Solar Panel Manufacturing - ML309840

    Rotary Actuator for Solar Panel Manufacturing - ML309840

    • High torque, heavy duty
    • Free floating aluminum pistons with pressure and wear compensating pistons seals for long life and low friction
    • Heavy duty sealed ball bearings ensure shaft stability under heavy and high impact loading
    Series AV Pneumatic NFPA Cylinder for Cleanroom

    Series AV Pneumatic NFPA Cylinder for Cleanroom

    • Modified to adapt to specific clean room specifications
    • Designed to provide long life in many rugged applications
    • Wide range of options and sizes
    • Vacuum port standard
    Series CR Pneumatic Compact Cylinder

    Series CR Pneumatic Compact Cylinder

    • Compact design where space is limited
    • Multiple mounting options
    • Self-lubricating nitrile piston seal for long cylinder life
    Series CV Pneumatic ISO Cylinder with Rodlock

    Series CV Pneumatic ISO Cylinder with Rodlock

    • Locks the piston rod while in a stationary position
    • ISO/VDMA interchange for easy mounting (metric unit)
    • PTFE wear ring and built-in shock pads for long cylinder life
    • Polymer rod bearing
    Series GRA Parallel Pneumatic Micro Gripper

    Series GRA Parallel Pneumatic Micro Gripper

    • Compact size
    • Manifold porting
    • Internal speed control
    Series GRF MRO Pneumatic Parallel Gripper

    Series GRF MRO Pneumatic Parallel Gripper

    • 6 million cycles minimum rated life
    • High grip froce
    • Light weight
    Series GRL Narrow Body Pneumatic Parallel Gripper

    Series GRL Narrow Body Pneumatic Parallel Gripper

    • Parallel jaw motion simplifies jaw tooling design and is ideal for gripping parts of varying sizes
    • Available in two sizes (imperial and metric) and four travel lengths
    • 6 million cycles minimum rated life
    • Low operating pressure
    • Standard manifold option
    Series RAS High Load Pneumatic Rotary Actuator

    Series RAS High Load Pneumatic Rotary Actuator

    • High axial and radial bearing loads
    • Zero backlash at ends of rotation
    • Wide variety of options and accessories
    • Standard angle adjustments
    • Pinion options available
    Series RCC Cable-Driven Pneumatic Rotary Actuator

    Series RCC Cable-Driven Pneumatic Rotary Actuator

    • Low profile design for confined spaces
    • Available in three bore sizes and two standard rotations (90º and 180º)
    • Standard internal shock pad eliminates metal-to-metal contact, reducing noise and end-of-rotation impact forces
    Series RFS Low Profile Pneumatic Rotary Actuator

    Series RFS Low Profile Pneumatic Rotary Actuator

    • Compact size and low profile design
    • One piece hub and piston assembly
    • Fully adjustable stops
    Series RI High Force Pneumatic Rotary Actuator

    Series RI High Force Pneumatic Rotary Actuator

    • High torque
    • High axial and radial bearing load
    • Thru hole shaft for built-in air communication ports
    Series SAH Compact Thruster Pneumatic Slide - ML308918

    Series SAH Compact Thruster Pneumatic Slide - ML308918

    • Incorporates twin switch slots for flush switch mounting
    • Available in nine bore sizes to meet a wide range of applications
    • Available in two bearing types (two bearings per shaft, four total)
    Series SD/SE Versatile Thruster Pneumatic Slide

    Series SD/SE Versatile Thruster Pneumatic Slide

    • Offered in short or long body in five bore sizes
    • Available with standard or oversize shafts
    • Standard dowel pin holes for ease of mounting
    Series SFP Rodless Gantry Rail Pneumatic Slide

    Series SFP Rodless Gantry Rail Pneumatic Slide

    • Space-saving design with smooth, precise movement
    • High load capacity with very low deflection
    • Available in two bore sizes
    Series SHP Miniature Rail Thruster Pneumatic Slide

    Series SHP Miniature Rail Thruster Pneumatic Slide

    • Built-in travel adjustment
    • Multiple mounting surfaces
    • High load carrying capacity
    Series SIP Low Profile Miniature Rail Thruster Pneumatic Slide

    Series SIP Low Profile Miniature Rail Thruster Pneumatic Slide

    • Compact, low-profile design with high load carrying capability
    • 3 bore sizes (12, 16, and 20 mm) are available with an optional travel adjustment
    • Profile ground rail bearing technology
    Series STP Compact Rail Thruster Pneumatic Slide

    Series STP Compact Rail Thruster Pneumatic Slide

    • Designed for precision movement
    • Built for high speed, high accuracy, and high load applications
    • Five bore sizes with three travel lengths per bore size
    Single Jaw PCB Gripper - ML302993

    Single Jaw PCB Gripper - ML302993

    • Compact and narrow, simple design
    • Long life, high holding force
    • Cutout design for larger components
    • Clamp arm clears body
    Stainless Steel Slide - ML303439

    Stainless Steel Slide - ML303439

    • 316 stainless steel
    • Wash down environment
    • Long life
    Three Bore Ring Thruster - ML302190

    Three Bore Ring Thruster - ML302190

    • Designed to be a direct replacement for three compact air cylinders - AS 3/4 x 1 1/4
    • Unique misalignment ring allows for only one cylinder to operate without binding
    • Various stroke, bore sizes, and configurations available
    Unique Cylinder - ML305422

    Unique Cylinder - ML305422

    • Low breakaway
    • Customer-specified tool plate configuation
    Variable Pick Head - ML306008

    Variable Pick Head - ML306008

    • Ideal for final packaging process
    • Motor driven pitch
    • Pneumatically-driven vertical slides

    Contact Us

    9009 Clubridge Drive
    Fort Wayne, IN 46809

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